Hitachi FT160 XRF Analyzer w/ Poly-Cap Technology:
for ultra thin film coating measurements of micro-spot areas
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Equipped with poly-capillary x-ray focusing optics and a high resolution silicon drift detector (SDD), the FT160 XRF Analyzer by Hitachi High-Tech provides high precision and throughput for small spot and ultra thin coating thickness measurement needs. The stage movement of the FT160 is fast and precise, developed to hit the measurement spot quickly, measure, and move on to the next spot. The FT160 XRF allows users to improve both throughput and precision. |
Top Four Features of the Hitachi FT160 Micro-XRF Analyzer
Polycapillary X-Ray Focusing Optics
see highly precise measurements on small spot targets
Silicon Drift Detector (SDD) Technology
high count rate and resolution with the latest XRF detector technology
Automatic Measurement Assistant Function
multi-point measurements are automatic and precise to improve your lab efficiency
Easy Operation Software
newly designed software makes daily operation simple for any operator level
Polycapillary X-Ray Focusing Optics
see highly precise measurements on small spot targets
Silicon Drift Detector (SDD) Technology
high count rate and resolution with the latest XRF detector technology
Automatic Measurement Assistant Function
multi-point measurements are automatic and precise to improve your lab efficiency
Easy Operation Software
newly designed software makes daily operation simple for any operator level
Three chamber configurations to meet the needs of various users.
The most common configuration is the FT160 which has an optional wafer holder.
Other options are the FT160S for compact laboratory space and the FT160L for larger samples.
All three have options for a standard or high-sensitivity detector (SDD), choice of W or Mo tube,
and come with a 17um FWHM beam size, auto-focus features, and image processing.
Every Hitachi FT160 provides industry leading XY stage movement...
stage precision of <+/- 2um and stage speed of 80 mm/s
The most common configuration is the FT160 which has an optional wafer holder.
Other options are the FT160S for compact laboratory space and the FT160L for larger samples.
All three have options for a standard or high-sensitivity detector (SDD), choice of W or Mo tube,
and come with a 17um FWHM beam size, auto-focus features, and image processing.
Every Hitachi FT160 provides industry leading XY stage movement...
stage precision of <+/- 2um and stage speed of 80 mm/s
Hitachi FT160 XRF, interior chamber and stage